Fundamentals of Semiconductor Fabrications, Gray S. May and Simon M. Sze, John Wiley and Sons,2004.
Modular series on Solid State Devices, Volume V, Introduction to Microelectronic Fabrication, Richard C. Jager, Addison-Wesley Publication
Semiconductor Devices, Physics and Technology, Simon M. Sze, John Wiley and Sons ,2013.
Introduction
Crystal Growth
Silicon Oxidation
Photolithography
Etching
Diffusion
Ion Implantation
Film deposition
Process Integration
- Project 20% - Seminar 20% - Final exam 60%
Introduction –> Download
Crystall Growth –> Download
Silicon Oxidation –> Download
Photolithography –> Download
Etching –> Download
Diffusion –> Download
Ion Implantation –> Download