About the lab

The Microfabrication Lab provides basic process equipment for fabricating and studying micro-scale semiconductor and photonic devices. It supports graduate research projects and the practical side of the courses on semiconductor devices and fabrication taught by Prof. Razaghi.

Process capabilities

• Photolithography (contact printing)

• Dry (reactive-ion) and wet etching

• Thin-film deposition by sputtering

• Dry thermal oxidation

• Resist spin coating and baking

See the full list on the Equipment page, and the information for lab users.

Contact

For questions about the lab please contact Prof. Razaghi.