Chapter 3 · Visualization 6 of 6 · Section 3.2

C–V With a Contacted Inversion Layer

With an n⁺ region next to the gate, electrons enter and leave the inversion layer in nanoseconds, so the capacitance returns to C′ox in inversion at any frequency. VCB moves the rise.

Small-signal gate capacitance C′gb = dQ′G/dVGB at fixed VCB

Where the small-signal charge goes at your VGB

What to look for

1/C′gb = 1/C′ox + 1/(C′b + C′i) (all charges follow the signal)

  • Below VTB all curves are the same: accumulation and depletion do not know about terminal C.
  • Above VTB the inversion electrons, supplied by the n⁺ region, answer the signal at the surface: C′ returns to C′ox.
  • Larger VCB: the dip is wider and deeper, because the depletion region grows further before inversion begins.

Try this

  1. Measure VTB from the rise of the curve for VCB = 0, 1, 2 V and compute VT = VTB − VCB. Fit γ.
  2. Set VGB just above VTB. How is the signal charge split between electrons and the depletion edge?
  3. In depletion the isolated and contacted curves coincide, whatever VCB. Why?
  4. Thin the oxide to 2 nm. Why does the dip become shallower?