Quantum capacitance and the 60 mV per decade rule  (Datta Sec. 7.3.1, Eqs. 7.10–7.14)

Equilibrium (no drain bias). The gate tries to pull the 2D band edge down by qVG; the electrons that pour in charge the channel and push it back up. Below threshold almost nothing pushes back, so n grows 10× for every kT·ln10 ≈ 60 mV. Above threshold the oxide capacitance CE and the quantum capacitance CQ = q²D₀ act in series.

Electron density n–
CE = ε/tox · CQ here–
Gate efficiency dU/d(−qVG)–
Subthreshold slope–